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A project log for Vacuum System for Deposition

I have been putting a system together for the past few years to do different kinds of deposition.

jerry-biehlerJerry Biehler 04/23/2015 at 05:460 Comments

Digging though the interwebs I have pretty much figured out this is a Veeco 770 and Cha SE-600 mashup. The base is Veeco, the 19" Jar, lifter, heater control, and planetary system is Cha Industries.

I have spent the past week or so getting this new system running. Ran into a huge problem with the cooling system, the water line feeds the diff pump, the water cooled feedthroughs, the jar, the ferrofluidic rotary feedthrough, and the crystal sensor holder. I had 31 bad brass fittings. Almost every flare fitting had at least one crack down the length of it and some almost crumbled. Swagelok fittings just snapped in half, and ever big heavy brass tees and street 45's had cracks right down the length. Mind you this system has been kept in a heated warehouse so there was no freezing. I really have no idea what caused this, I have never seen brass act like this. My best guess is they were not using RO/DI water in the loop and some sort of electrolysis set in with power running from the water cooled feedthroughs that supply power to the evaporating boats. Its only a couple volts but that could be all it took.

Or it could have been something in the water. The reservoir for the cooler had a layer of foam in it when it first started circulating. I flushed it out and it is now running clean with RO/DI water.

Thats all fixed now and the flow meter got new o-rings as well. Got it down to the low -7 last night, with LN2 in the trap I should be able to get down to the -8. The cooler might be a little small for the pump and system. The lines were starting to get above ambient, I may have to add a secondary radiator.

All of the fittings I replaced, eventually I will section a couple of them and check them out with the SEM and EDX to see of there was a change in the alloy radially through the part:

New plumbing for the feedthroughs with copper flares, push on connectors, and polyurethane tubing.

Foam on the water.


One of the many split fittings:

It's alive!

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